Periodic Silicon Metasurfaces for High Performance Structural Color

Structural color can be divided into plasmonic structural color and all-dielectric structural color, and dielectric structural color is becoming the first choice for making structural color because of its high color saturation and low cost. In this work, a large area of silicon-based structural color was fabricated using the Taber effect based on laser interference theory from commercial silicon-on-insulator (SOI) substrates on the basis of FDTD simulation. Consequently, periodic grating silicon metasurfaces with a width of 106 nm can achieve a maximum spectral reflectance of up to 91% at 650-700 nm, which can produce bright red structural color, providing a reliable way for the fabrication of low cost and high performance dielectric structural color at low cost.