Improvement of the Phase-Shifting Algorithm in the Measurement of Silicon Sphere Diameter by Simulations

In order to address the limitations of traditional seven-sample algorithms for phase calculation in the measurement of silicon sphere diameter, this article proposes an improved seven-sample algorithm. This algorithm retains all the advantages of traditional methods while effectively eliminating algorithmic errors arising from positioning deviations in step size. Through comprehensive analysis and numerical simulation, the algorithm’s performance has been thoroughly evaluated. The results demonstrate that the improved algorithm not only eliminates or reduces algorithmic errors caused by phase-shifting linear and nonlinear errors but also significantly reduces the impact of intensity errors related to multibeam interference. Even in the presence of a significant step deviation, the improved algorithm can minimize its adverse impact on the measurement accuracy of the silicon sphere diameter.