System Level IC Analog Processing Design For Piezoresistive MEMS Pressure Sensor

This paper presents an electronic readout integrated circuit (IC) design for a piezoresistive MEMS pressure sensor, based on system level approach. The system level approach provides key parameter evaluation in early design stage and system verification at later stages, thus reducing development time and cost. The electronic readout model consists of an instrumentation amplifier, low-pass filter and MASH ∑∆-modulator. The focus of this work is to find the optimal dynamic parameters of the analog signal processing circuit for achieving different levels of pressure sensor inaccuracy. The simulation results demonstrated that sensor inaccuracy of 0.05% due to electronic readout can be achieved by SFDR of 61 dB and SNR of 70.4 dB.