A Finite Element Study of SMR-Based MEMS Magnetoelectric Micro Antenna for On-Chip RF Energy Harvesting

Magnetoelectric (ME) antennas exhibit significant potential for ambient RF energy harvesting. COMSOL Multi-physics software was used to develop a 2D finite element model for an aluminum nitride (AlN)/Terefnol-D heterostructure-based solidly mounted resonator (SMR) ME antenna based on MEMS technology. The proposed SMR ME antenna with three pairs of SiO2/Mo Bragg reflector layers has a dominant resonance frequency of 1850 MHz with a bandwidth of 36 MHz and a spurious mode at 960 MHz. At 960 MHz, with an in-plane RF magnetic field perturbation of 0.9 mT, the maximum induced ME voltage was 19 $\mu \mathrm{V}$.