Preliminary Simulations and Experiments of Enzymatic MOS Biosensors

This paper presents two variants of the MOS biosensors in respect to the arrangement and place of the enzymatic membrane: enzyme over the gate layer as ENFET (ENzyme Field Effect Transistor) or enzyme entrapping on a separate area connected through a long trace to the gate, as EGFET (Extended Gate Field Effect Transistor). First case is associated by Atlas device simulations, while the second one is accompanied by preliminary experiments for the enzyme immobilization.