Subwavelength-Engineered Antislot Photonic Crystals in a Silicon Photonics Foundry for On-chip Communications

We report scalable foundry fabrication and characterization of photonic crystal nanobeam waveguides incorporating subwavelength-scale dielectric antislot unit cells. This work enables enhanced light-matter interaction and three-fold improvement in $\mathrm{V}_{\pi}\mathrm{L}$ when incorporated in Mach-Zehnder modulators.