Step response analysis for MEMS capacitive accelerometer

MEMS capacitive accelerometer are used in many applications. In this paper MEMS capacitive accelerometer has been simulated using Simulink software for different device parameter (mass, Area, and $d_{0}$) values. The MEMS accelerometer is modeled as a spring mass system followed by a capacitance to voltage converter. The step response of the device has been analyzed and the relationship between $V_{o u t}$ and $\Delta C$ has been established. Such studies are useful in selecting device parameters for sensor design.