Amplification of 193 nm radiation in argon-fluoride and generation of tunable VUV radiation by high-order anti-Stokes Raman scattering

Tuned narrow-bandwidth UV radiation at 193 nm is generated by SRS of dye laser radiation and is amplified in ArF sections. In a subsequent second hydrogen Raman cell anti-Stokes radiation up to the sixth order (around 130 nm) is generated. Power measurements and calibration are described.