Sensor and Device for Non-Contact Temperature Measurement of Structural Elements of Micro- and Radioelectronics Products

The paper presents the structural scheme and describes the principle of operation of a temperature sensor with the transmission of measurement information by means of optical radiation. The sensor is realized according to the scheme of multivibrator on a Schmitt trigger with a thermistor in the feedback circuit, the oscillation frequency of which depends on the temperature. The photodetector designed to measure the parameters of the optical signal of the sensor is described. The results of measurements of the conversion function and calibration characteristic of the sensor are given, the dependence of the sensor sensitivity on temperature in the range from 25 to 100 °C is determined. The developed sensor can be used as an integrated means of diagnostics of thermal parameters of design elements of micro- and radioelectronics products both at the stage of prototype production and during operation.