Characterization of Kinetic Inductance and Sensitivity in Superconducting MKIDs with Varied Aluminum Film Thicknesses

This paper examines how the thickness of Microwave Kinetic Inductance Detectors (MKIDs) films affects their sensitivity. We fabricated MKIDs with different film thicknesses on monocrystalline silicon substrates and investigated their response rate, noise, and sensitivity at 100 mK. Our results indicate that changes in film thickness do not impact the noise spectrum, but they do lead to a decrease in the responsivity of the MKID. Ultimately, this decrease in responsivity results in a reduction in the sensitivity of the MKIDs.