Iterative Control Tuning: With Application to MIMO Precision Motion Systems

High precision motion control is one of the core techniques for high-end manufacturing industries, which usually requires two major procedures, i.e., model-based design and data-based tuning to meet the tightening performance requirements. Model-based design can provide a nominal control solution, the performance of which is usually limited due to modeling errors. Data-based tuning can further extract the desired performance without increasing the control complexity. To illustrate this idea, this article presents an iterative control tuning scheme based on an example of a multi-input–multi-output precision motion system. Differing from the existing results, this article develops a joint static control decoupling and feedforward tuning approach for the first time illustrating the idea of the control architecture tuning not only the conventional control component tuning. The proposed approach can achieve the desired performance of the basic decoupling control architecture. In addition, the proposed approach can achieve accurate and fast tuning by making full use of feedback control signals through a data-driven process. The effectiveness of the proposed approach is verified through both simulation results and experimental results on the short-stroke motion stage of the projection lens testing equipment.