A Single MEMS Sensor Based on SnO₂ Nanosheets for Selective Gas Identification

In recent years, the challenge of poor selectivity in a single gas sensor has received significant interest. This work presents a facile method for the concurrent analysis of sensor temperature variations and conductivity changes in a SnO2 nanosheets-based gas sensor, enabling the selective detection of various gases (such as H2, NH3, and CO). When exposed to reducing gases, the sensor typically exhibits increases in temperature (calorimetric readout) and current (chemo-resistive readout), resulting from the exothermic reaction between the gases and surface oxygen species. The integrated assessment of temperature elevation and conductivity alterations in a single sensor offers an innovative strategy for gas identification and concentration measurement.