An Onsite Calibration Procedure for Accurate Electrical Constants Measurement with Terahertz Time-Domain Ellipsometry

In this work, an onsite calibration method based on gradient descent is presented, designated for electrical property estimation with terahertz time-domain ellipsometry. We first discuss the relation between angular installation error of polarizers, the possible incorrectness in incident angle and their effects in estimated sheet resistivity. Based on the results, we then developed an iterative procedure, to provide guidance for tuning the components, in order to calibrate the system accordingly.