On-Chip Microstrip Antenna Array for Millimeter Wave Technology

Recently, On-Chip Antennas (OCA) have become one of the most extensively researched topics in the antenna community, particularly in the context of millimeter-wave and terahertz technologies. The integration of antennas with the remaining circuitry on a single chip and the potential for achieving high data rates, facilitated by the utilization of high frequencies, are two main factors behind the growing interest in this technology. This paper introduces an on-chip antenna array implemented on a high-resistivity silicon substrate. Additionally, it presents reflection coefficient measurements for four prototypes of a printed patch antenna array, conducted in a probe station environment at 60 G Hz. The measured results indicate a favor-able agreement between the on-wafer probe station environment's input match and the simulated counterpart.