Development of Graphene Resonant Sensor with PIN Photodiode for On-Chip Mass Measurement

A high-sensitivity graphene-based MEMS resonance mass sensor is being developed to realize environmental virus detection. To increase its sensitivity and portability, it is necessary to integrate it with a PIN photodiode to enable on-chip resonance measurements. This report describes the fabrication and evaluation of such an integrated device. Graphene excitation was performed by a modulated laser and polysilicon was used to protect the device from the excitation laser, while a higher wavelength laser was used to probe the graphene vibration. On-chip resonance measurement was successfully realized with a SNR of 10 dB, demonstrating the feasibility of on-chip mass measurement with the fabricated device.