Enhanced 2D Beam scanning: optical-Phase-array on piezo-cantilever

This work reports the development of an enhanced 2D beam scanning by combining 200 mm silicon (Si) photonics and 200 mm Si MEMS technologies. It demonstrates the fusion of an active photonic beam-steering circuit within a piezoelectrically actuated micro-cantilever. Operating at a wavelength of 905 nm, the optical phased array (OPA) enables beam scanning up to 17° in one dimension. Simultaneously, the circuit's inclination, in a second dimension, can be independently adjusted over a range of up to 40° via the piezoelectric actuator. This paper will focus on the technological process that combines photonics and piezoelectric materials, as well as the possibility of tailoring the cantilever resonance frequencies via the dimensional parameters, to suit various target applications.