A Predictive Gradient Based LMS Filter for Micro-Opto-Electro-Mechanical Systems

In order to estimate the state of MEMS micromirror in the environment with random noise, in this paper, a so-called predictive gradient based least mean square (PG BLMS) filtering method is proposed. In this filtering method, a stochastic state space model with hysteresis is developed to describe characteristic of MEMS micromirror disturbed by random noise. Then, the PGBLMS filter is developed using the established model to eliminate the influence of random noise. Subsequently, the proposed filtering method is applied to the state estimation of an electromagnetic scanning micromirror disturbed by random noise.