Establishment of Rate-Dependent Hysteresis Model and Control Method of Piezoelectric Ceramic Actuator

Piezoelectric ceramic actuators (PEA) are commonly utilized for accuracy orientation, precision measurement, vibration isolation, and other fields due to their high positioning accuracy and fast response speed. However, the inherent hysteresis of piezoelectric ceramics seriously influences their positioning precision. Studies have shown that the hysteresis of piezoelectric ceramics has rate-dependent properties. Based on this feature, this paper firstly designs an improved rate-dependent Bouc-Wen hysteresis model and uses particle swarm optimization to identify the model parameters. Secondly, the inverse hysteresis model is established, and a feed-forward controller based on the inverse model is designed to linearize the input and output of the PEA and improve its hysteresis. Finally, the model verification of the established hysteresis model and experimental verification of the feed-forward control method show that the rate-dependent hysteresis of the PEA can be well-fitted based on the improved rate-dependent Bouc-Wen hysteresis model. The experimental results demonstrate that the linearity of the output displacement of the piezoelectric actuator is significantly improved, and the hysteresis error is reduced from $21.9 \%$ to $2.5 \%$ at 1 Hz and from $\mathbf{2 5. 8 \%}$ to $7.1 \%$ at 50 Hz, which verifies the validity of the proposed method.