Manufacturing Process and Comparative Analysis of MEMS Accelerometers

Accelerometer is the device that can measure the acceleration of an object by transferring acceleration into a electric parameter, such as voltage, current and resistance etc. By applying a mathematical relationship between the electrical parameter and acceleration, the rate of change of speed of the object can be determined. However, conventional accelerometers are large, leading to higher energy consumption and inefficient use of space. Therefore, a miniaturized accelerometer is needed. This article introduces the manufacturing process of an accelerometer using MEMS (Micro-Electro-Mechanical Systems) technology. The total size of the proposed system is 68 μm × 51 μm × 30μm.