Design and Realization of a High-Precision Cavity Optomechanical Accelerometer

This paper proposes the development of a high-precision cavity optomechanical accelerometer. It is composed of a photonic crystal cavity structure and a straight-beam mechanical oscillator structure that are designed on a silicon on SOI (Silicon-On-Insulator) wafer with a top silicon thickness of 500 nm. The working principle of the cavity optomechanical accelerometer is analyzed, the mechanical modes of the mechanical oscillator and the optical modes of the photonic crystal cavity are simulated, the theoretical detection accuracy of the accelerometer is calculated to be $5.86{\text{ug}}/\sqrt {{\text{Hz}}} $, and the accelerometer samples are further fabricated by using the micro-nano-machining process. The accelerometer is characterized by high sensitivity and low noise, which can be widely used in the fields of high-precision vibration detection, inertial measurement and inertial navigation.