The optimal design of cavity optomechanical micro-hemispherical gyroscope

Micro-hemispherical resonator gyroscope (micro-HRG) is one of the most precise micro-vibratory gyroscopes. However, traditional micro-hemispherical resonator gyroscope has complex processing and weak anti-electromagnetic ability. Micro-HRGs based on optomechanical drive the resonator cavity and detect angular velocity/vibrations through optomechanical interactions, offering advantages such as ultra-high precision and ease of control. This paper investigates the driving and detection mechanisms of angular velocity and vibrations in micro-HRGs based on cavity optomechanics and Whispering Gallery Mode (WGM), as well as their structural design methods. It includes simulation analyses of performance in optical modes and mechanical modes. In terms of optical modes, the paper discusses and analyzes the influence of the length and thickness of the outer edge of the resonator on the optical resonance frequency and the optical quality factor; in terms of mechanical modes, it discusses and analyzes the influence of the radius and length of the support column on the mechanical resonance frequency.