Electrical Characterization of AlScN Ferroelectrics

Aluminum Scandium Nitride (AlScN) is a III-V compound ferroelectric with promising applications in sensing, RF circuits, memories, and neuromorphic computing. Additionally, its high-temperature stability as well as large remnant polarization and tunable coercive field make it an ideal choice for extreme operating environments. In this work, we characterized AlScN samples and report their ferroelectric properties. Additionally, we report on a well-defined relationship between coercive field and measurement frequency.