Research on Plasma Electrodeless High-Precision Spectral Calibration Light Source with Wide Spectrum Range

Spectral calibration sources are essential for the calibration and characterization of spectroscopic detection equip-ment. This paper presents the design of an inductively coupled light source as a spectral calibration source. We employed a longitudinal magnetic field inductive discharge design, conducted a simulation analysis of the magnetic field distribution within this design, and solved the drift-diffusion equations to obtain the electron temperature and energy distribution of the generated plasma. The designed RF circuit has a stable resonant frequency at 13 MHz, and the operating power can be adjusted between o and 20 W. This device demonstrates excellent performance and stability, offering a longer lifespan compared to traditional calibration sources.