3D Printing Electrodes in Micro Shell Resonant Gyroscope Heads

The micro shell resonant gyroscope
$(\mu \text{SRG})$
is a solid-state vibration gyroscope based on elastic wave precession at the micro shell resonator rim with high precision, simple structure, and long-term reliability. The fabrication of driving/detecting electrodes for high precision excitation and measurement is of great importance and remains challenging. This paper reports the design, fabrication, and characterization of a 3D printable lateral conformal cylindrical electrodes for the
$\mu \text{SRG}$
. With the 3D printing process, the electrode structure is fabricated in only two steps. It creates a controlled capacitance gap and simultaneously metalized resonator and transverse electrodes. An umbrella-shaped cylindrical electrode structure is 3D printed to ensure that the separate lateral electrodes are at different potentials after metal film coating. This work has demonstrated a potential mass-produced
$\mu \text{SRGs}$
, paving the way for the development of portable inertial navigation micro hemispherical resonator gyroscopes.