Low Loss Assembly of Micro Shell Resonators

The micro shell resonator is the core sensing component of the high precision micro shell resonator gyroscope. High quality factor of micro shell resonator represents low loss, which is essential to the performance of the gyroscope. In this paper, a model of the micro shell resonator is built in the finite element software and the loss of the resonator is studied by simulation. The shell resonators are assembled on the substrates and the quality factors of the resonators were tested by Laser Doppler Vibrometer with different adhesives and substrates. The simulation results indicate that the size and property of adhesive affect the Q value of the resonator. In the LDV test, the Q value of the second-order mode of the micro shell resonator assembled by adhesive SPI 05001-AB have an increase of 522.60% compared with the adhesive Crystalbond 590. With two different substrates, the change of Q value of the third-order reached two orders of magnitude. Hence, a suitable adhesive and substrate configuration can reduce the loss of micro shell resonator and the results can be applied to the assembly process of resonator and planar electrode to achieve higher performance gyroscope.