Hysteresis Modeling and Compensation of One-Dimensional Piezoelectric Driven Positioning Stage Based on PI Model

The hysteretic nonlinear characteristics of the nanopositioning stage based on piezoelectric ceramic actuator seriously affect its tracking and positioning accuracy. As the one-dimensional piezoelectric driven positioning stage studied in this paper has single-loop hysteresis characteristics, the feedforward compensation control method based on the traditional PI model is used. The experimental results confirm that the input and output of the positioning stage show a relatively good linear relationship. The maximum position of the compensated nanopositioning stage relative to the ideal state is 0.042%.