Modeling and compensating control of hysteresis nonlinearity in a piezo-electric actuator based on VTSPI model

In this paper, VTSPI model is proposed to improve the nanopositioning accuracy on piezoelectric actuators-based devices by improving on the classical Prandtl-Ishlinskii (CPI) model. By dividing the voltage-displacement hysteresis characteristic curve of the piezoelectric actuator into four segments, the accuracy of its hysteresis characteristic modeling is improved. Finally, the VTSPI inverse model is used for feed-forward compensation control of the stage. The experimental results show that the nanopositioning accuracy of the VTSPI model is improved by 99.271% and 86.022% compared with other PI models.