Rate-dependent Hammerstein Model and H∞-robust Tracking Control for Linear Reluctance Actuator

With the increasing demand of high performance motion in ultra-precision motion platform, a new type of reluctance actuator is introduced to achieve a large output factor in a small stroke range. In order to solve the nonlinear control problem of the reluctance actuator, a Hammerstein structure consist of Bouc-Wen model and ARX model is developed, and an $H_{\infty}$ robust controller is designed to achieve high performance and stable motion control of the reluctance actuator system. The effectiveness of the designed control system is verified by simulation, which implements the steady-state error less than $10^{-5} \mathrm{~m}$ within 0.1 s convergence time under single and composite frequency excitation in $1 \sim 30 \mathrm{~Hz}$.