Design of RF MEMS Shunt Capacitive Switches Using Dimples and Meanders

This paper presents the RF performance analysis of various designs of RF - MEMS shunt capacitive switches in coplanar configuration. The switches consist of slotted bridges of a variety of shapes such as circular, hexagonal, and rectangular. The design consisting of the rectangular slotted bridge exhibits the best performance with a maximum insertion loss of 0.08 dB, return loss of greater than 20 dB and isolation of more than 30 dB. The design has an operational frequency range from DC-40 GHz. The designs are modelled and simulated using High Frequency Structure Simulator (HFSS).