A Flow Control Valve using Piezoelectric Vibrator for Hydraulic Soft Actuators

In this study, we have fabricated and evaluated a flow control valve for oil-hydraulic soft actuators. To install oil-hydraulic actuators on a robot to realize actuation with high-power, there is a demand for compact and lightweight control valve. Based on particle excitation type valve driven by piezoelectric vibrators, we have designed a fluidic control valve for hydraulic actuators. In this valve, the particle excitation type valve is used as a pilot valve to control the spool of main valve. The fabricated valve has been evaluated for a control of the supplied fluid at a pressure of 5 MPa. As a result, we have succeeded in controlling a hydraulic artificial muscle.