Modeling of Horizontal Integrated Silicon Field Emitter for On-Chip Free Electron Interactions

We present the modeling of an on-chip planar electron gun using COMSOL Multiphysics. The beam coming from this electron gun goes through a trench crossing a photonic crystal. The interaction between the electrons and the photonic crystal generates photon emission by Cherenkov effect [1],[2]. An objective is to realize an electron gun working from 30V to 1000V voltage. To obtain enough photons conversion and reach the laser threshold, we aim to reach 100 nA of current in 1 mrad. The electron gun will be fabricated using several steps of e-beam lithography. Modeling of the electron gun and electron trajectories will allow to reach optimal performances while preventing from device failures.