A Nano-Focus X-Ray Source with Nanoneedle Cold Cathode by Simulation

An X-ray source based on a nanoneedle cold cathode has been developed. The optimized electron-gun structure and electrical excitation parameters were simulated to obtain a minimum focus spot size (FSS). At the same time, a suppressor electrode structure was introduced in the system to effectively reduce the divergence of the electron beam. The minimum FSS of around 150 nm was obtained which shows nanoscale resolution for X-ray tube. The new X-ray source has the potential to improve the resolution for nanoscale imaging.