Development of stable high-resistance standard resistors

Japan Finechem Company and NMIJ/AIST have developed stable high-resistance standard resistors for over a decade. The prototype 10 TΩ and 100 TΩ standard resistors showed stable resistance change during the comparison with domestic companies/institutes in Japan and with VSL. The drift rates per year of the recent few years are +13.0 μΩ/Ω and −14.7 μΩ/Ω, respectively.