Research on fF Range on-chip Capacitance Standard

The femtofarad (fF) range on-chip capacitance standard has been designed and fabricated. Guided by the theoretical calculations and simulation analysis, capacitances in the range of 10 fF-100 fF with an accurate step of 10 fF have been achieved using an interdigital capacitance standard by means of incremental capacitance. The accuracies of these capacitors are better than 5%, and the typical measurement uncertainty is less than 0.5%×C+100 aF (k=2) where C is the nominal value of capacitor.