NOEMS Power Multiplied: A Novel Array-Based Multiplexing Scheme

Nano-Opto-Electromechanical Sensors (NOEMS) have recently emerged as a high-performance alternative to classical MEMS for a variety of sensing applications [1]. Harnessing the high bandwidth of optomechanics for large-scale sensor multiplexing is one of the potential advantages of NOEMS, although it has proven experimentally challenging. This paper reports for the first time the concept and demonstration of a novel multiplexing strategy, enabling high-data-rate mechanical sensing enhanced by photonics. The novelty is based on the use of electro-optic modulators (EOM), which allow isolating the responses linked to each photonic sensor by associating their characteristic wavelength to different spectral bands, while optical detection provides a sensitive and interference-free readout. Compared to other NOEMS multiplexing strategies, this method is distinguished by simplicity, high integration through compatibility with silicon photonic components [2], and flexibility. Finally, we demonstrate that this straightforward multiplexing readout architecture does not degrade the sensing resolution.