Analysis and Requirements Definition of End Effector Design for a Semiconductor Wafer Handling

Presented study is related to end effector design for handling of semiconductor wafers. Design concepts are reviewed and analysed, based on predefined requirements. Two types of gripping - mechanical contact and pneumatic non-contact - are examined. Several design variants of mechanical contact grippers are assessed using virtual prototyping. Advantages of Bernoulli gripper are evaluated and next design step challenges are outlined. It is selected for further concept detailed examination and development.