High-Frequency Dynamic Compensation for Contact Scanning Probe Based on Dual-Parameter Feedback Optimization of Pole Configuration

High precision and high efficiency are the main characteristics of contact scanning probes, but the deterioration of dynamic measurement accuracy caused by high-speed and high-frequency excitation is becoming increasingly prominent. Therefore, this article proposes a dynamic compensation method for high-frequency errors based on dual-parameter feedback optimization of pole configuration. Initially, the original dynamic characteristics of the probe are analyzed by combining with a kinematic model, including transient impact and steady-state resonance characteristics, revealing the impact of damping ratio and first-order natural frequency on dynamic performance. Then, a dynamic compensator based on gain matrix dual-parameter feedback optimization is developed to achieve high-frequency-adaptive high-precision compensation by dynamically adjusting pole configuration. Subsequently, through numerical simulation and comparative experimental analysis, the proposed method is validated for its high-precision compensation effect on wideband dynamic signals, particularly high-frequency signals.