Design of a Compact Rotational Compliant Stage with Two-stage Lever Amplification Mechanism

Rotational stages with high-accuracy positioning performance are a key component to deal with the errors of array alignment in industries. In this paper, a new compliant mechanism is developed to perform the task of rotational motion output, where a two-stage lever amplification mechanism is designed to have a compact design. Then, the compliant mechanism is kinematically analyzed and the compliance model of the second lever mechanism is established. Based on the model, the dimensions are optimized to have a pure rotational motion output. Finally, the whole design is simulated and evaluated in association with COMSOL. The results show that the proposed design can output a 0.79 mrad motion with a 9-µm displacement input of the actuator, and the first-order natural frequency is determined as 2219 Hz, which confirms the compact design.