Sensing Voltage of MEMS Accelerometer using Indium Antimonide (InSb) and Diamond

Accelerometers are inertial sensors that detect acceleration and forces along three orthogonal axes; the readings are then produced as a digital or analog signal and used in various applications. Microelectromechanical systems (MEMS) have recently been utilized to perform inertial sensing techniques on an integrated circuit (IC) at micro size. Due to the various characteristics of MEMS materials and how they affect the sensitivity of the MEMS Accelerometer with these variations. In this study, a MEMS accelerometer model was created using the COMSOL program. The design was then applied to Indium Antimonide (InSb) and Diamond, and the sensing voltage was determined using each material to clarify which of these materials performed best. it was found that the Indium antimonide is the best, as the output, if used, is 65%higher than that of Diamond, using the same parameters and at a constant temperature.