Synthesis and Characterization of Hierarchical ZnO/ZnS Nanostructures on Porous Silicon for Advanced MEMS Applications

This study uses a straightforward and cost-effective method to present the synthesis, morphological, and structural characterization of hierarchical ZnO/ZnS nanostructures formed on porous silicon substrates. We achieved flower-like crystallites by employing a two-stage synthesis process, showcasing a unique morphology with an increased surface area. Detailed analysis through Raman spectroscopy and X-ray diffraction (XRD) elucidated the heterostructure’s high crystallinity and structural integrity despite inherent lattice mismatches. The study reveals that the flower-like hierarchical morphology, combined with the material’s compositional properties, significantly enhances its physicochemical properties. These findings suggest potential ZnO/ZnS heterostructure applications in various microelectromechanical system (MEMS) technologies, including sensors, photodetectors, and photocatalysts.