Electrodynamic Modeling the Motion Devices of MEMS

The properties of electrical parameters of the MEMS run parts are studied in the paper. The analytical approach is performed for description of the impact of the components of electrical field (EF) on the effects that result in coupling the components of electromagnetic (EM) field and the parts of the MEMS run parts. The self-inductance of two types of microsolenoids is calculated analytically that easy way to modeling and parameter’s optimization of the MEMS run parts, which are the actuators, sensors and so on.