Waveguide Feeding in 3-D Heterogeneous Integration of Holographic Antenna

This paper presents a method for integration of planar holographic antenna (HA) working in the D-band (110–170GHz), based on 3-D heterogeneous integration of microelectromechanical system (MEMS) packaging technology. Firstly, the paper proposes a waveguide feeding structure for HA together with a waveguide feed network, which can produce pure TM
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mode to reduce the overall height of HA and the transmission loss caused by complex feeding networks. The waveguide feeding network has minimal insertion loss within its operating frequency band. Then, a new simple modulation method for HA design is proposed in this paper to reduce the impact of processing and design errors.