Design of Piezoelectric Ceramic Power Amplifier Based on Milti-phase-shifted Half-bridge Topology

Piezoelectric ceramics are widely used in the fields of precision machining, micropositioning and microelectronics science and technology due to their stable chemical properties and excellent dynamic response characteristics. However, conventional piezoelectric ceramic power amplifiers have great limitations, such as low output current, high output voltage harmonic distortion rate, large output voltage ripple and other defects. To address these defects, a piezoelectric ceramic power amplifier based on a six-phase-shifted half-bridge topology is proposed in this paper. The power amplifier is characterized by high output current, low voltage ripple and low harmonic distortion rate. The amplifier consists of four components: a signal acquisition module, a signal modulation module, a power amplifier module and an LCL filter module. The signal acquisition module acquires external input signals, modulates the acquired signals with the FPGA controller, then controls the six-phase-shifted half-bridge circuits for power amplification, and filters the required signals with the LCL filter to realize the amplification of the input signals. It is verified that the amplifier can operate with a bandwidth of 20Hz ∼ 1kHz under a load of 10uf, an output voltage of 0 ∼ 1000V, an output current of up to 30A, a total harmonic distortion rate (THD) of less than 2%, and an output voltage ripple of less than 50mV.