Preparation of Transparent Conductive Thin-Film Coatings by Spray-Pyrolysis

Metal oxides doped with various impurities form the basis of transparent conductive oxides (TCO). The most common transparent conductive oxide films are the compounds $\mathrm{SnO}_{2}, \mathrm{In}_{2} \mathrm{O}_{3}, \mathrm{CdO}$ and ZnO. On the basis of these materials, thin-film transparent conductive oxide coatings were obtained by spray-pyrolysis. It should be noted that indium oxide doped with tin has the best parameters (conductivity, transparency), which are the most important from the point of view of application with layers of solar cells, in transparent electrodes, LEDs, displays. However, due to the high cost of this material, other alternative materials are often used in production. Analysis of the pairs of thin films used in transparent electrodes showed that the resistivity value should not be lower than $10^{-3} \Omega \cdot \mathrm{cm}$. Similarly, the transmittance value in the visible light range should be at least $80 \%$. A database of experimental samples synthesized from various materials has been formed: tin dioxide doped with fluorine; aluminum alloyed zinc oxide; indium oxide with tin admixture; gallium oxide doped with indium and tin; gallium doped zinc oxide; vanadium oxide, tungsten oxide, zirconium oxide.