Dynamically Tunable VO2-based Hybrid Infrared Metamaterial

The work is devoted to the design of VO
2
-based metamaterial for the electromagnetic radiation dynamic control in infrared range. For this aim, the electromagnetic response of hybrid metamaterial based on silicon cylindrical resonators conjugated with a vanadium dioxide disks was numerically simulated. The resonant properties of the constituent components, including vanadium dioxide disks, silicon cylindrical pillars arrays have been comprehensively investigated. It has been established that the spectral features in infrared range ($\mathbf{4 0 - 1 8 0} \mathbf{~ T H z}$) are caused by Mie resonances and localized surface plasmons. The influence of the geometric characteristics of the structure and the presence of a substrate on the electromagnetic characteristics was determined. During the phase transition of vanadium dioxide from the semiconducting to metallic state for a structure with a radius of 500 nm, interplay of resonances and an increase in the reflection coefficient from less than $\mathbf{1 \%}$ to $\mathbf{2 8 \%}$ are observed in the region of overlap of the Mie resonance in semiconductor pillar and localized surface plasmon in metallic vanadium dioxide disk. The results obtained are promising for the creation of nanophotonic modulators in the infrared range.