Temperature Effect on the Optical Characteristics of a Microoptoelectromechanical Accelerometer

The treatise studies the temperature sensitivity of the optical transmission coefficient of an microoptoelectromechanical accelerometer (MOEMA) based on the optical tunneling effect in a temperature range from minus $40^{\circ} \mathrm{C}$ to plus $100^{\circ} \mathrm{C}$. Two types of optical measuring transducers are studied: based on a directional coupler or a resonator. It is shown that the major contribution to the temperature error of the MOEMA’s transmission coefficient is made by the alteration of the optical transmission coefficient (OTC). For a measuring transducer based on a directional coupler, the temperature sensitivity of the OTC amounted to $0.00058{ }^{\circ} \mathrm{C}^{-1}$. That for a transducer based on a resonator amounted to $0.33{ }^{\circ} \mathrm{C}^{-1}$, which definitely speaks of its inability to operate without a thermostatic system. Following the results, the contribution of the refraction index alteration depending on temperature more than 5 times exceeds that of the MOEMA’s mechanical parameters for optical measuring transducers based on the directional coupler and more than 3000 times for the resonator.