Studying the Trajectory of Scattered Ions from Surface Atomic Rows SiO2(001)<110> at Glancing Incidence

Simulated using the binary method collision approximation trajectories of scattered ions $\mathrm{Ne}^{+}, \mathrm{Ar}^{+}, \mathrm{Xe}^{+}$from the surface atomic rows of SiO
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(001)<110> at angles of incidence $\psi=5^{0}$ and $9^{0}$, with an initial energy of 5 keV are presented in this article. It has been established that with an increase in the masses of bombarding ions, the number of trajectories of scattered ions from surface atomic rows increases and the number of trajectories of scattered ions from the surface atomic row increases. The influence of which atom of the chain influences the scattering process more than other atoms is determined. It is shown that during multiple scattering of ions there is a pair of more severe collisions, which determine the further direction of the scattered ion. The distances where the interaction of an ion with a surface atom ends are calculated, i.e. the end point of the trajectory for all ions bombarding surfaces. We also studied the dependence of the polar scattering angle on the aiming point of bombarding ions $\mathrm{Ne}^{+}, \mathrm{Ar}^{+}, \mathrm{Xe}^{+}$from the surface atomic rows of SiO
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(001)<110> at incidence angles $\psi=5^{0}$ and $9^{0}$, with an initial energy of 5 keV. It has been established that when bombarded by ions at grazing angles, mainly specular scattering of ions from surface atomic rows is observed. The polar angle of the first trajectory has a large value, and the last trajectory has the smallest value.