Simulation, Measurements and Analysis of the CMOS Temperature Sensor

This paper describes a CMOS temperature sensor, focusing on measurements and analysis of selected aspects of its performance. The measurements showed high thermal linearity of the scrutined sensor. Measurements include not only the sensor's performance for large temperature ranges by testing it in a thermal chamber, but also by attempted use of the electrothermal filter and ESD structures placed near the sensor as heating elements. In addition, the response of the temperature sensor and electrothermal filter to visible and near-visible irradiation was studied, providing interesting results.