A Wideband Push-Pull $\Phi_{2}$ Amplifier with PCB Inductors and Rogowski Coils for RF Plasma Generators

Inductively coupled plasma (ICP) is a common source needed in semiconductor manufacturing. Driven by fast-changing RF electrical signals, high-power ICP is generated inside the vacuum chamber for wafer processing. The printed circuit board is a mature manufacturing technology with low-cost, robust, and easy-controlled results. Here, we demonstrate a 13.56 MHz, 100 W, push-pull $\Phi_{2}$ resonant amplifier for ICP applications and a Rogowski coil-based current sensor for feedback control.