Developing MEMS Electric Current Sensors for End-use Monitoring of Power Supply: Part XIII - Analytical Study on Thermoelastic Damping for Structural Optimization Applicable to Resonant Galvanometers

In this paper, a thermoelastic damping (TED) theory with a partially covered bilayer cantilever is used to provide a solution to structural optimization. Finite element simulation shows that TED at eigen frequency increases with the increase of both thickness and length of the metal layer. TED value is increased by 6481.7% when both Lr and hr range from 0 to 1. In addition, the increasing rate of TED along the extension direction of the layer from the clamped end of the Si cantilever is greater than that of the free end, when Lr ranges from 0 to 0.6; while the variation tendency is reversed when Lr ranges from 0.6 to 1. In summary, TED is affected by the deposition direction of the layer, and is effectively decreased by reducing layer thickness and layer length, which are believed to be applicable to the structural optimization of resonant galvanometers.